When it comes to semiconductor manufacturing technology, Rexroth offers mechatronic modules designed for smooth motion during wafer handling as well as non-contact material for the process chambers and a higher level of nano-meter scale positioning accuracy. Bosch Rexroth wafer handling and wafer processing solutions are designed to perfectly balance high-dynamic servo drives, high-rigidity linear subsystems and pneumatic actuators – with high rigidity and no overshoot or backlash.